高可靠性、高生产率、高精度 / CC-LINK、RS-232 通信,可
支持各种 Size(2“至 18”)的瓦夫勒。
主要特征:
■ Link Arm Size
Stroke (Single / Dual)
• 100mm, 130mm, 150mm, 165mm, 175mm, 250mm
- 100 Arm (Arm St. : ±190mm)
- 130 Arm (Arm St. : ±250mm)
- 150 Arm (Arm St. : ±290mm)
- 165 Arm (Arm St. : ±320mm)
- 175 Arm (Arm St. : ±340mm)
- 250 Arm (Arm St. : ±490mm)
■ Wafer Size Link Arm Implement minimum radius of rotation
■ Z Axis Option (Low Pass Line And Long Stroke)
: Stroke And Type (Telescopic type, Belt, Ball Screw)
■ Driving Axis Option
: Stroke And Type (Linear, Belt, Ball Screw, Rack Pinion)